Note: Automated maskless micro-multidomain photoalignment.
نویسندگان
چکیده
We present a fully automated maskless exposure system for the fabrication of microscopic orientational surface alignment patterns. The maskless system allows us to fabricate arbitrary surface patterns over a 2 mm × 2 mm area with a resolution of 2.2 μm. A confocal autofocus system insures accurate and repeatable focus. Microscopic orientational surface patterns have been demonstrated to exhibit a variety of novel functionalities, such as surface alignment multi-stability.
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عنوان ژورنال:
- The Review of scientific instruments
دوره 82 12 شماره
صفحات -
تاریخ انتشار 2011